,申请号JP19910271024-传众专利搜索

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发明名称
摘要
申请公布号	JP3243722(B2)	申请公布日期	2002.01.07
申请号	JP19910271024	申请日期	1991.10.18
申请人		发明人
分类号	C23C16/34;C23C16/511;C30B25/02;C30B29/38;H01L21/28;H01L21/285;(IPC1-7):H01L21/285	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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