发明名称 SPINNER EQUIPMENT HAVING NON-CIRCULATING DUCT SYSTEM
摘要 PURPOSE: Sinner equipment having a non-circulating duct system is provided to prevent the inside of a spinner from being contaminated and to extend a life cycle of a chemical filter by exhausting the air exhausted from the lower portion of the spinner by an exhaust duct. CONSTITUTION: A spinner(17) and an air conditioning system(3) are prepared. Air filtered from the air conditioning system is supplied to the spinner by the first duct(4). Air exhausted from the spinner is exhausted to the atmosphere by an exhaust duct(16). An ammonia density in the air inside spinner equipment is maintained.
申请公布号 KR20020000355(A) 申请公布日期 2002.01.05
申请号 KR20000034910 申请日期 2000.06.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SUN YEONG;PARK, YEONG HO
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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