发明名称 FERROELECTRIC CAPACITOR AND METHOD FOR MANUFACTURING THEREOF
摘要 A dielectric capacitor having excellent dielectric properties which comprise s a silicon oxide layer (4), a lower electrode (12), a ferroelectric layer (8) , and an upper electrode (15) formed on a silicon substrate (2). The lower electrode (12) is formed of palladium oxide, and so is the upper electrode (15). Palladium oxide prevents the permeation of oxygen through the dielectr ic layer (8), thus offering a dielectric capacitor having excellent dielectric properties.
申请公布号 CA2197491(C) 申请公布日期 2002.01.01
申请号 CA19962197491 申请日期 1996.07.05
申请人 ROHM CO., LTD. 发明人 NAKAMURA, TAKASHI
分类号 H01G4/33;H01L21/02;H01L21/314;H01L21/3205;H01L21/768;H01L27/08;(IPC1-7):H01G7/06 主分类号 H01G4/33
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