发明名称 Method and design for the suppression of single event upset failures in digital circuits made from GaAs and related compounds
摘要 Single event upset failure are suppressed in GaAs-based electronics by implanting the GaAs substrate with an appropriate dose of O and at least one of either Al, Cr, or In.
申请公布号 US6335562(B1) 申请公布日期 2002.01.01
申请号 US19990457521 申请日期 1999.12.09
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY 发明人 DIETRICH HARRY B.;KANG JIN U.;MOLNAR BELA;FRANKEL MICHAEL Y.
分类号 H01L21/26;H01L21/265;H01L21/322;(IPC1-7):H01L23/58 主分类号 H01L21/26
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