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发明名称
METHOD FOR FORMING FERROELECTRIC CAPACITOR TO PREVENT SHORT BETWEEN UPPER AND LOWER ELECTRODE
摘要
申请公布号
KR20010113271(A)
申请公布日期
2001.12.28
申请号
KR20000033537
申请日期
2000.06.19
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KWON, SUN YONG
分类号
H01L27/105;(IPC1-7):H01L27/105
主分类号
H01L27/105
代理机构
代理人
主权项
地址
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