| 摘要 |
A procedure is described to calibrate an optical converter (1), especially for use in the field of reflectrometric interference spectroscopy. The converter (1) has a layer/substrate system with a layer (2) and a substrate (3). A light beam (4) shines from the substrate (3) side, and parts of it are reflected (8-10) or transmitted (11) at the interfaces of air/substrate (5), substrate/layer (6) and layer/air (7). The converter (1) in particular serves to convert the light beam (4) into a modulated (especially frequency modulated or phase modulated) signal. The light (4) is varied within a wavelength or frequency range from which a corresponding modulated spectrum is determined. In particular, it is assumed that the performance quantities of especially the converter and a radiation source generating the light (4) are subject to temporal fluctuations. The calibration is carried out in particular by determining reference values of the modulated spectrum at time t=0, successively determining values of the modulated spectrum for times t>0, and calculating temporal changes in the modulated spectrum for t>0 using in particular a linear disturbance equation based on the assumed infinitisimal changes in at least one of the performance quantitieso the interference spectroscopy measuring setup.
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