MICROMECHANICAL STRUCTURE, IN PARTICULAR FOR AN ACCELERATION SENSOR OR YAW RATE SENSOR AND A CORRESPONDING METHOD FOR PRODUCING THE SAME

摘要

The invention relates to a micromechanical structure and to a corresponding method for producing the same. The structure comprises a substrate (10) which has an anchoring element (20) and a flywheel (30) that is connected to the anchoring element (20) using a spiral spring device (40) in such a way that the flywheel (30) can be pivoted elastically out of its resting position. The flywheel (30) has intermediate gaps and is configured so that it can pivot, by the etching of an underlying sacrificial layer (50). The sacrificial layer (50) lies beneath the flywheel (30) in a first zone of a first etchable thickness (d1) and a second zone of a second etchable thickness (d1+d2+d3), whereby the second thickness (d1+d2+d3) is greater than the first (d1). The flywheel (30) is configured in the first zone in such a way that a maximum of two etching faces can meet during the etching process, thus limiting the deposits of etching residue.