| 摘要 |
While maintaining transferability of a subject to be processed, plasma is made uniform. The plasma processor comprises a member for generating plasma and a member for controlling axial symmetry of the generated plasma. The axial symmetry control member comprises pin conductors movable in Z direction and an insert type gate valve. By approaching the pin conductor to the insert type gate valve and by arranging the pin conductors along an inside shape of the insert gate valve, even in the portion of the insert gate valve, an electric current can be flowed similarly with the portion of the chamber wall. Thereby, current flow can be made uniform.
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