| 摘要 |
<p>A method for determining measurement uncertainty in accordance with the present invention includes the steps of providing an intensity profile for bullet and target features for an overlay measurement (304), determining locations representing edges of the bullet and target features on the intensity profile (306), determining an average centerline between edge pairs of one of bullet features and target features (308), computing a redundant measurement between an edge pair distance of one of the bullet features and the target features and the average centerline of the other of the bullet features and the target features (312) and determining an uncertainty between two different redundant measurements (314).</p> |
