发明名称 CERAMIC FILM AND METHOD FOR ITS PREPARATION, AND SEMICONDUCTOR DEVICE AND PIEZOELECTRIC ELEMENT
摘要 <p>A method for preparing a ceramic film, which comprises a step of forming a ceramic film (30) through crystallizing a raw material (20), wherein the raw material (20) contains different types of materials in a mixed state, which are different from each other with respect to at least one of the condition for crystal growth and the mechanism of crystal growth. The method can be used for improving the morphology of the surface of a ceramic film.</p>
申请公布号 WO2001098212(P1) 申请公布日期 2001.12.27
申请号 JP2001005069 申请日期 2001.06.14
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址