发明名称 Bulk single crystal gallium nitride and method of making same
摘要 A single crystal M*N article, which may be made by a process including the steps of: providing a substrate of material having a crystalline surface which is epitaxially compatible with M*N; depositing a layer of single crystal M*N over the surface of the substrate; and removing the substrate from the layer of single crystal M*N, e.g., with an etching agent which is applied to the substrate to remove same, to yield the layer of single crystal M*N as said single crystal M*N article. The bulk single crystal M*N article is suitable for use as a substrate for the fabrication of microelectronic structures thereon, to produce microelectronic devices comprising bulk single crystal M*N substrates, or precursor structures thereof.
申请公布号 US2001055660(A1) 申请公布日期 2001.12.27
申请号 US20010933943 申请日期 2001.08.21
申请人 TISCHLER MICHAEL A.;KUECH THOMAS F.;VAUDO ROBERT P. 发明人 TISCHLER MICHAEL A.;KUECH THOMAS F.;VAUDO ROBERT P.
分类号 C30B33/00;H01L21/205;H01L33/00;(IPC1-7):B32B3/00 主分类号 C30B33/00
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