发明名称 Probe card and a method of manufacturing the same
摘要 In a probe card for testing a plurality of semiconductor integrated circuits formed on a semiconductor wafer in a lump, only a faulty probe can be repaired without removing all probes from a wiring board. The probe card comprises a plurality of probes to be connected to respective testing electrodes formed on the semiconductor wafer, and wiring means provided with pads to be jointed to the probes, wherein the pads is formed on the upper surface of the wiring board.
申请公布号 US2001054906(A1) 申请公布日期 2001.12.27
申请号 US20010875067 申请日期 2001.06.06
申请人 FUJIMURA NAOYUKI 发明人 FUJIMURA NAOYUKI
分类号 G01R1/073;G01R3/00;H01L21/66;H05K3/34;(IPC1-7):G01R31/02 主分类号 G01R1/073
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