发明名称 Reference wavelength light generating apparatus
摘要 A reference wavelength light generating apparatus is disclosed in which light emitted from a light source is branched by a light branching unit, one of the branched lights is extracted as a measuring beam and the other is extracted as reference wavelength light by passing through a collimator and an absorbing member and then being reflected by a reflecting member to return to the branching unit.
申请公布号 US2001055112(A1) 申请公布日期 2001.12.27
申请号 US20010837085 申请日期 2001.04.17
申请人 MATSUBARA YASUAKI 发明人 MATSUBARA YASUAKI
分类号 G01J3/10;G01J3/28;G01N21/27;G02B6/42;H01L33/58;(IPC1-7):G01J3/00 主分类号 G01J3/10
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