| 发明名称 |
A SEMICONDUCTOR PROCESSING SYSTEM WITH LAMP COOLING |
| 摘要 |
A semiconductor processing system includes a process chamber and an assembly of radiant energy sources. The radiant energy assembly is filled with a thermally conductive gas to cool the radiant energy sources.
|
| 申请公布号 |
WO0199157(A1) |
申请公布日期 |
2001.12.27 |
| 申请号 |
WO2001US19279 |
申请日期 |
2001.06.15 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RANISH, JOSEPH, M.;HEGEDUS, ANDREAS, G. |
| 分类号 |
H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
