| 摘要 |
PROBLEM TO BE SOLVED: To reduce a processing time for judging the coincidence of an inspection picture and a template and to reduce nonuniformity with respect to the judgment of the coincidence. SOLUTION: The binary picture of an object to be inspected whose external shape is circular is generated (S1). Next, a circumscribed rectangle circumscribed to the object to be inspected within the binary picture is set (S2). The center coordinates of this circumscribed rectangle are obtained as those of the object to be inspected (S3). Next, after a pixel being an edge within the binary picture is extracted as an edge point (S4), an angle which is formed with respect to a horizontal direction by a straight line combining the center coordinate and each edge point is obtained (S5). Furthermore, the histogram of the generating frequencies of each angle is generated (S6). The correlation coefficient between a histogram generated from the object to be inspected to be reference and a histogram obtained by shifting the histogram generated from the object to be inspected for comparison by each regulated angle portion is calculated to use a maximum value among the correlation coefficients as the coincidence of both of the objects to be inspected (S7). |
