| 摘要 |
PROBLEM TO BE SOLVED: To reduce costs by eliminating the need for providing an oil mist separator when introducing air for purge to a laser oscillation device and the need for passing air through the air dryer of a cooling water device in the laser oscillation device, and reducing the amount of consumption of air. SOLUTION: Air pipelines 9, 10, and 11 are connected to a cover 6 where a total reflection mirror 4 and a partial reflection mirror 5 are accommodated inside, and a plurality of cavities 3 that are accommodated in the cover 6 and at the same time accommodate a solid laser medium 2 inside so that air from an air cylinder 7 can be introduced. A moisture detector 12 and a particle counter 13 are provided in the cover 6. When moisture is larger than a value that is detected by the moisture detector 12 or the particle counter 13 or the preset value of the number of particles, a valve open command VO is given from a control device 14 to a solenoid valve 8 that is provided at the air pipeline 9, and the solenoid valve 8 is opened.
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