| 摘要 |
PROBLEM TO BE SOLVED: To provide an air knife-drying device for blowing off water drips completely, and then preventing mist containing such impurities as particles from adhering again. SOLUTION: This air knife-drying device is provided with a first air knife 2 that is arranged at the upstream side of the transport of a substrate 1, and a second air knife 3 that is arranged at a downstream side. The first and second air knives spray gas to an object to be dried from opposite directions when viewed along a transport direction, and have an arrangement where they are not located within a range in the blow-out direction for the total width of the other supply opening in a plan view.
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