| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid processing device with a cleaning function which is capable of cleaning adhered a processing liquid together with materials to be processed when performing liquid processing. SOLUTION: In performing the liquid processing by adhering a processing liquid to the materials 16 to be processed while the materials 16 to be processed are placed on an endless belt 100 and transported by a belt transporting device, the cleaning the adhered processing liquid together with the material 16 to be processed is made possible to lessen maintenance work and further, the adhesion of the processing liquid remaining on such as the endless belt 100, to the materials 16 to be processed which are freshly coated with the processing liquid is prevented, thereby, the occurrence of unevenness in the processing liquid is prevented.
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