发明名称 CAPACITY TYPE PRESSURE SENSOR
摘要 PROBLEM TO BE SOLVED: To keep sensing sensitivity unchanged regardless of any change in installation attitude. SOLUTION: The apparatus is provided with a bed 4 which has a base 1 supported through a plurality of support members 1b-1d, a lead 3b connected to an electrode 1a through a first through hole piercing the base 1, the support member 1d and the bed 4 and a lead connected to an electrode 2a through a second through hole piercing the base 1, the support member 1c and the bed 4. The bottom part of the base 1 facing a first diaphragm 2 makes up a second diaphragm for receiving pressure.
申请公布号 JP2001356062(A) 申请公布日期 2001.12.26
申请号 JP20000176763 申请日期 2000.06.13
申请人 YAMATAKE CORP 发明人 ISHIKURA YOSHIYUKI
分类号 G01L9/12;H01L29/84;(IPC1-7):G01L9/12 主分类号 G01L9/12
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