SEMICONDUCTOR MEMORY INSPECTION EQUIPMENT, INSPECTION METHOD, AND RECORDING MEDIUM RECORDING INSPECTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To reduce a cost for inspecting a defective address of a memory to be inspected and to enable specifying cause of a defect. SOLUTION: An address region of a memory M to be inspected is divided into plural address blocks AB1-AB4, on the other hand, a fail memory FM is divided for each size of address blocks, and turned to plural sub-fail memories FM1-FM3, one of sub-fail memories is selected corresponding to an address block of a defective address which is discriminated by testing the memory M to be inspected, and information of the defective address is written in a corresponding address in a selected sub-fail memory. Defective information can be stored using a fail memory FM of which address size is smaller than that of a memory M to be inspected, and an inspection cost can be reduced. Also, information of a defective address for each reading can be taken out, specifying cause of a defect can be easily performed.