SPECTROSCOPIC METHOD AND METHOD FOR FORMING FILM

摘要

PROBLEM TO BE SOLVED: To provide a spectroscopic method with small errors, a method for measuring a thickness and a method using these methods for forming films. SOLUTION: An incident light is brought into a light dispersion means to split the light for each wavelength. The split light of each wavelength is brought into a conversion means for converting the light to an electrical signal corresponding to an intensity of the light. In obtaining a spectroscopic spectrum from the obtained electrical signal, the wavelength of the light entering a specific position on the conversion means is determined by a calibration expression derived from characteristics of the light dispersion means.