PUMP FOR SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress occurrence of pulsation to continuously and smoothly circulate and transport liquid and to substantially reduce installing space. SOLUTION: Bellows 7 and 18 are provided so as to mutually face each other inside casings 6 and 17 fixed and connected to both side parts of a partition wall 1 provided with a liquid inflow passage 2 and an outflow passage 3. The one bellows 7 is provided so as to expand and contract via an air cylinder part 14 for composing a reciprocating pump part 4. A liquid chamber 20a capable of temporarily storing liquid discharged from the pump part 4 and an air chamber 20b sealed with gas are formed in the other bellows 17 side to absorb pulsation caused by discharge pressure of the liquid discharged from a pump acting chamber 9a of the pump part 4.