| 摘要 |
PROBLEM TO BE SOLVED: To repeatedly generate stable pulsed X-ray with high average output power by supplying stable cryotarget layer continuously. SOLUTION: In this X-ray generating device, forming a cryotarget layer by making rare gas contact, cool, solidify and deposit on the surface of a rotating body kept at a cryogenic temperature, and generating pulsed X-ray by convergently irradiating pulsed laser beam on the surface, a time for restoration is secured by controlling direction of rotation and movement in the axial direction of the rotating body, making a spatially fixed condensed irradiation point move against the surface of the rotating body along a prescribed trajectory, and by making a pitch of the condensed irradiation in the peripheral direction shift by half pitch (Px/2) in peripheral direction at the time before and after reversing the movement in the direction of the axis of the rotating body so as not to irradiate a crater C when reversing the direction. |
