| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas detoxifying system which prevents the temperature rising of a detoxifying agent, satisfactorily assures the safety and, at the same time, enables drastically reducing the consumption of dilution gas and an operation method thereof. SOLUTION: Adjustment of the introduced amount of dilution gas from a dilution gas introducing means 16 or control of operation of a semiconductor producing device 15 is performed based on the temperature of the detoxifying agent 12 measured at thermometers 13a-13d.</p> |
