| 摘要 |
<p>PROBLEM TO BE SOLVED: To lower the drive voltage of an electron emitting element resulting from electric field emission and preclude change of the emission current characteristics caused by leaving in the atmosphere, heating in the atmosphere, or heating in a vacuum. SOLUTION: The electron emitting element is equipped with a silicon substrate 14, an emitter 11 at least whose surface is formed by a porous silicon layer 15 on the base board of silicon, and a lead-out electrode 13 provided around the emitter 11 while a certain spacing is reserved in between. A metal or a good conductive member is provided at least either of on the surface and inside of the porous silicon layer 15 of the emitter 11.</p> |
