DEVICE AND METHOD FOR CLEANING SINGLE CRYSTAL PULLING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for eleaning a single crystal pulling apparatus by which dust on the inside of the apparatus can be sufficiently removed without detaching members installed on the inside of the apparatus. SOLUTION: The cleaning device 11 for cleaning the single crystal pulling apparatus for pulling a semiconductor single crystal from a semiconductor melt in a crucible 3 provided in a sealed vessel 1 is equipped with: a lid body 12 which ca be mounted in a closing state on the upper opening part of the above sealed vessel when the upper part of the sealed vessel is detached; an air blowing out mechanism 13 which is provided on the inner surface side of the lid body and capable of blowing out air to the inner surface side of the lid body; and an air suction mechanism 14 for sucking air from the inner surface side of the lid body and exhausting the air to the outside of the lid body.