| 摘要 |
PROBLEM TO BE SOLVED: To appropriately form a film in such a configuration that a film material produced in a film material producing chamber is carried via a carrying pipe. SOLUTION: This film forming apparatus comprises a superfine particles producing chamber 1 as the film material producing chamber, the carrying pipe 3 in which superfine particles as the film material produced in the superfine particles producing chamber 1 are introduced together with a carrier gas, a film forming chamber for applying the superfine particles carried through the carrying pipe to a substrate installed therein, a gas inlet of a carrier gas introduction unit 12 for introducing the carrier gas into the internal atmosphere of the superfine particles producing chamber 1, and a regulating mechanism including a rail 14 for regulating the position of the gas inlet and the introducing direction of the carrier gas into the internal atmosphere of the superfine particles producing chamber 1 from the gas inlet.
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