发明名称 Trench storage DRAM cell with vertical three-sided transfer device
摘要 A pair of dynamic random access memory cells having each end of the active area surrounded on three sides by a gate conductor. The width of each end of the active area that is surrounded by a gate conductor preferably is less than fifty percent of the width of the deep trench intersected by that end of the active area.
申请公布号 US6333533(B1) 申请公布日期 2001.12.25
申请号 US19990394964 申请日期 1999.09.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FURUKAWA TOSHIHARU;HAKEY MARK C.;HOLMES STEVEN J.;HORAK DAVID V.;KANARSKY THOMAS S.;MANDELMAN JACK A.
分类号 H01L21/8242;H01L27/108;(IPC1-7):H01L27/108 主分类号 H01L21/8242
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