发明名称 POLISHER, AND METHOD AND DEVICE OF POLISHING OPTICAL COMPONENT USING IT
摘要 PROBLEM TO BE SOLVED: To provide a polisher capable of smoothing and/or mirror finishing an optical component at a low cost and efficiently, and polishing device and method using this. SOLUTION: This polishing device of the optical component comprises a hollow columnar elastic polisher 1 for smoothing and mirror finishing the optical component, a means for adjusting pressure in the polisher 1, a means for deforming the shape of the polisher 1, a means for rotating the polisher 1, a means for holding a work, a means for rotating the work, a means for oscillating the work with respect to the polisher 1, a means for supplying a tape-like or belt-like polishing member 3 to a gap between the polisher 1 and the work, and an applying means of polishing pressure, and a means 15 for supplying liquid and/or abrasive material.
申请公布号 JP2001353650(A) 申请公布日期 2001.12.25
申请号 JP20000178355 申请日期 2000.06.14
申请人 SEIKO EPSON CORP 发明人 TABATA YOSHINORI;MIYAZAWA MAKOTO
分类号 B24B13/01;B24B13/02;(IPC1-7):B24B13/01 主分类号 B24B13/01
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