发明名称 |
Vacuum chamber for flat substrates |
摘要 |
A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.
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申请公布号 |
US6332525(B1) |
申请公布日期 |
2001.12.25 |
申请号 |
US20000549544 |
申请日期 |
2000.04.14 |
申请人 |
LEYBOLD SYSTEMS GMBH |
发明人 |
GEBELE THOMAS;ROEDLING GERT |
分类号 |
B65G49/06;B65G49/07;C03C17/00;C23C14/56;H01L21/677;(IPC1-7):B65G13/00 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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