METHOD AND DEVICE FOR FORMING DIAMOND FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a diamond film from a microwave plasma, in which production conditions are controlled on the basis of spectral measurement of the light emitted by the plasma and by which the high quality diamond film having a large surface area can be obtained. SOLUTION: This method for forming the diamond film comprises introducing a gaseous mixture of a hydrocarbon gas and gaseous hydrogen into a reaction vessel, then exciting the introduced gaseous mixture with microwaves introduced into the reaction vessel to generate the plasma, measuring spectra of the light emitted by the plasma and controlling the conditions for forming the diamond film so that spectra of a carbon molecule (C2) are included within a prescribed required range.