发明名称 PERFORATED ANODE FOR UNIFORMLY DEPOSITING METAL LAYER
摘要 PROBLEM TO BE SOLVED: To provide a device and a method to be used while a metal depositing cell is actuated. SOLUTION: This device includes a perforated anode 202 extended practically horizontally over the full width of the metal depositing cell. A plurality of holes 206 are extended substantially and so arranged that an electrolyte flows substantially uniformly over the full width of the cell. The collision of the particles eroded off form the anode 202 with the substrate is limited by a hydrophilic membrane 204. The membrane 204 can be extended over the full width of the cell. Meanwhile, the membrane can also be extended only across the part positioned directly above the anode 202. In this case, the electrolyte flows across the anode without encountering the membrane.
申请公布号 JP2001355096(A) 申请公布日期 2001.12.25
申请号 JP20010130328 申请日期 2001.03.23
申请人 APPLIED MATERIALS INC 发明人 DORDI YEZDI N
分类号 C25D17/00;C25D7/06;C25D7/12;C25D17/06;C25D17/10;C25D17/12;C25D21/06;C25D21/10;H01L21/20;H01L21/288;(IPC1-7):C25D17/00 主分类号 C25D17/00
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