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发明名称
摘要
申请公布号
JP2001527699(A)
申请公布日期
2001.12.25
申请号
JP19980550665
申请日期
1998.05.21
申请人
发明人
分类号
H01L21/304;H01L21/3105;(IPC1-7):H01L21/304
主分类号
H01L21/304
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