| 摘要 |
PROBLEM TO BE SOLVED: To stabilize arc discharge and to deposit a film uniform to time. SOLUTION: In the process of arc discharge, the tip part of an electrode is irradiated with a laser and is heated, by which materials are made hard to stick to the electrode, and further, the materials stuck to the electrode are immediately reevaporated, by which the deformation of the electrode caused by the sticking of the materials to the electrode is prevented.
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