发明名称 |
Periodic scheduler for robots in cluster tools |
摘要 |
<p>A method for scheduling the allocation of resources in a semiconductor object processing tool. The method comprises identifying a conflict in a resource allocation schedule for the processing of a plurality of semiconductor objects through the tool over time. The schedule utilizes a fundamental period for scheduling the periodic introduction of the objects into the tool for processing. A conflict arising when a transport mechanism adapted to move the objects to and from the resources in the tool is scheduled to execute more than one transport action in a given time interval. The time blocks associated with the conflict are rescheduled from a present time interval to a different time interval such that the rescheduling of the time block does not violate a post-processing residency constraint for a residency time that the object spends in the resource whose time block is rescheduled.</p> |
申请公布号 |
AU5942101(A) |
申请公布日期 |
2001.12.24 |
申请号 |
AU20010059421 |
申请日期 |
2001.05.03 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
BABAK HAMIDZADEH;SHADI ROSTAMI-HESARSORKH;DANIEL CAMPORESE |
分类号 |
G05B19/418;G06Q10/06 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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