| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump system that is simple in wiring and in installation, is less susceptible to noise, is low in cost and in electric power, and is usable with another or other such systems. SOLUTION: The turbo-molecular pump system comprises, within a turbo- molecular pump 1A, a motor driving circuit 51 for supplying a motor driving current to a motor 30 in the turbo-molecular pump 1A, and a first optical communication interface circuit 56 for receiving a digital control signal for control of the motor driving current from outside and, in dependence on the control signal, controlling the motor driving current supplied from the motor driving circuit 51; and comprises, externally, a controller 80 for generating the digital control signal for control of the motor driving current of the turbo-molecular pump 1A. The control signal that the controller 80 generates is transmitted to the first optical communication interface circuit 56 of the turbo-molecular pump 1A through an optical fiber cable 2.
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