发明名称 ELECTRONIC DEVICE PACKAGING SUBSTRATE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a capacitor capable of having high versatility and improving reliability onto an electronic device packaging substrate. SOLUTION: This electronic device packaging substrate includes coaxial multilayer structure that is composed of a center conductive part 1, a cylindrical dielectric layer 2 that is formed around the center conductive part 1, and a cylindrical conductive layer that is formed around the cylindrical dielectric layer 2, and an insulation layer where a plurality of coaxial multilayer structures are mutually embedded at intervals.
申请公布号 JP2001352017(A) 申请公布日期 2001.12.21
申请号 JP20000168836 申请日期 2000.06.06
申请人 FUJITSU LTD 发明人 YOKOUCHI KISHIO
分类号 H05K3/00;H01L23/12;H01L23/15;H01L23/32;(IPC1-7):H01L23/32 主分类号 H05K3/00
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