| 摘要 |
PROBLEM TO BE SOLVED: To solve the fixed shaft difficulty in complete isolation between an O-ring and deterioration of an O-ring by aging in vacuum actuator, in which a magnetic encoder is used to detect an rotating angle of a working shaft and the O-ring is provided between a fixed shaft and an encoder case for isolation between the internal mechanism of encoder and vacuum environment. SOLUTION: An annular recessed section 21 is formed to the fixed shaft 10 of the vacuum actuator A11 in such a manner as opening to the circumferential surface directed to the working shaft 31. A stator accommodating space is formed by hermetically sealing the opening of the recessed section 21 with a cylindrical member 22. In this stator accommodation space, a stator Sm1 of the motor section M1 and a stator Sd1 of a resolver type rotating angle detecting section D1 are accommodated.
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