| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-frequency power supply for an electron beam irradiation apparatus, capable of increasing a ramp up/down speed of an electron stream. SOLUTION: A voltage, converted into a direct-current voltage by means of a rectifier circuit 12 and a charging capacitor C, is impressed to a pulse width modulation inverter 13 for converting the direct-current voltage into a high-frequency voltage, an output pulse voltage of the pulse width modulation inverter 13 is formed into a voltage with a peak value which corresponds to a pulse width b means of a reactor L and a capacitor C1, and this voltage is impressed to a step-up rectifier circuit 4 and a high voltage for an accelerator is obtained. High-speed charging to a capacitor in the step-up rectifier circuit can be carried out by means for the pulse width modulation inverter 13, while a low-voltage part of the acceleration voltage can be controlled, when the peak value is lowered by means of the reactor L and the capacitor C1. In this way, the response speed of the acceleration voltage even with respect to load fluctuation is increased, and also drop/popping of the acceleration voltage with respect to the high-speed load fluctuation can be reduced.
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