| 摘要 |
PROBLEM TO BE SOLVED: To provide a connecting technique for the mounting and the housing of an optical element which will not give adverse offsets to an optical system. SOLUTION: An electric permanent magnet (1) is provided at a device to couple the optical element 13, specially the housing or the mounting (4) of the lens element of a lens system (12) for a semiconductor lithography projecting printing machine, and the electric permanent magnet is magnetized by the magnetic field of a coil (5) connected with an energizing device (8), using a method by which the housing or the mounting (4) is coupled mutually by magnetic force.
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