| 摘要 |
PROBLEM TO BE SOLVED: To obtain desired sensitivity characteristics and dynamic range for radiation detection and by setting a space between electrodes as desired. SOLUTION: Two opposed electrode parts 10, 11 are fixed to the free ends of two displacement parts 4, 8 in the same structure, respectively. The displacement parts 4, 8 are two upper and lower layers formed of different materials having different expansion coefficients. The displacement part 4 is curved by receiving heat from an infrared absorption part 12 while the displacement part 8 is not subjected to heat from the infrared absorption part 12. The displacement parts 4, 8, when produced, are arranged sideways, not in layers, for simultaneous film formation.
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