发明名称 BLACK ANTIREFLECTION FILM AND OPTICAL DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain a black antireflection film which ensures the desired reflectance, independently of the characteristics of a formed black film. SOLUTION: The black antireflection film comprises a black coating film 2, formed on a substrate 1 and antireflection films 3, 4 each formed on the black coating film 2 and comprising a transparent material, having a refractive index different from that of an atmosphere in which the substrate 1 is disposed.
申请公布号 JP2001350003(A) 申请公布日期 2001.12.21
申请号 JP20000173428 申请日期 2000.06.09
申请人 NIKON CORP 发明人 DOMOTO TAKAHIRO;ONO ICHIROU;IKETANI SHIGERU
分类号 G02B7/02;B32B7/02;C23C14/06;C23C14/08;C23C14/10;C23C14/32;G02B1/11;G02B19/00;G03F7/20;H01L21/027 主分类号 G02B7/02
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