MOVING BODY, LINEAR MOTOR, WAFER STAGE, STAGE UNIT, AND ELECTRON BEAM PROCESSOR

摘要

PROBLEM TO BE SOLVED: To provide a moving body moving by generating a surface acoustic wave in which the movable distance is not limited by the distance between electrodes generating the surface acoustic wave. SOLUTION: The moving body 200 comprises a basic material 210 having a first face 212 and a second face 214 formed by removing a part of the first face 212, and an electrode 220 provided on the second face 214 without projecting from the first face 212 and generating a surface acoustic wave to the basic material 210.