| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase scavenging efficiency of a particulate substance by inexpensively manufacturing a fiber material composed of carbon fiber of a core part and SiC of a coating film with high strength in this DPF device. SOLUTION: This DPF device scavenges the particulate substance included in exhaust gas exhausted from an engine by a filter, and extinguishes the scavenged particulate substance, and the fiber material for constituting a filter body 5 of the filter 3 is composed of the carbon fiber 51 of a core material and silicon carbide 52 of the coating film for covering the whole surface of the carbon fiber 51 as a recess-projection surface 53. The fiber material forms the coating film 52 of a reaction layer of the silicon carbide on the surface of the carbon fiber 51 by reacting C of the surface of the carbon fiber 51 with Si of SiH4 by performing plasma processing on the carbon fiber 51 in an SiH4 atmosphere.</p> |
