| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck, capable of assuring insulation between resistance heating elements, even at a high temperature and preventing occurrence of a short circuit between electrostatic electrodes via the resistance heating element. SOLUTION: In the electrostatic chuck comprising a resistance heating element provided on a ceramic board, electrostatic electrodes formed on the board and a ceramic dielectric film provided integrally on the electrodes, the element is provided on a side face opposite to the surface of the board, having the ceramic dielectric film provided on the board.</p> |
