| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam exposure device which is free from fluctuation of magnetic field on an optical axis even when a magnet track movement type linear motor is used. SOLUTION: A coil 4 which is bared in accordance with a position of a magnet track 5 is generated. A prescribed magnetic field is formed by making a prescribed current flow to a prescribed coil among the bared coils 4. Then, a magnetic field from the coil acts on an optical axis as shown by a magnetic force line 7. Meanwhile, a magnetic field generated by a permanent magnet of the magnet track 5 acts on an optical axis as shown by a magnetic force line 6 and finally the sum of magnetic field shown by magnetic force lines 6, 7 functions on an optical axis. If the sum of magnetic field shown by the magnetic force lines 6, 7 is made fixed regardless of a position of the magnet track 5 by adjusting a current to be made to flow to the bared coil 4, a magnetic field on an optical axis does not vary due to movement of the magnet track 5.
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