| 摘要 |
PROBLEM TO BE SOLVED: To provide a peripheral aligner having few dust producing sources, capable of collectively exposing the exposure side of a rectangular substrate one by one, made compact and preventing throughput from lowering. SOLUTION: This aligner is constituted of an exposure unit provided with a bar type light source arranged in a horizontal direction and a stage on which the rectangular substrate is placed. Then, the stage is constituted so that only two axes in a direction orthogonal to the axial direction of the bar type light source and in a rotating direction can be moved.
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