| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-measuring instrument integrated scanning probe microscope which is hardly effected adversely from vibrations caused by the surface-measuring instrument. SOLUTION: The surface-measuring instrument integrated scanning probe microscope is equipped with an optical microscope 7, which is the surface- measuring instrument and a probe microscope 8. The optical microscope 7 is supported by the optical microscope support member 2, fixed to a vibration removing stand base 1 for attenuating floor vibration via an optical microscope z-stage 3 for moving the optical microscope 7 in the vertical directions. The probe microscope 8 is supported by the probe microscope support member 10, fixed to the vibration removing stand base 1 via a probe microscope z-stage 9 for moving the probe microscope 8. The shortest mechanical path, connecting the optical microscope 7 and the probe microscope 8, passes through the optical microscope z-stage 3, the optical microscope support member 2, the vibration removing stand base 1, the probe microscope support member 10 and the probe microscope z-stage 9.
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