发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having superior reliability in electric characteristics by preventing drop at the separating end of a Nch region or Pch region, and to provide a method for manufacturing the same. SOLUTION: The semiconductor device has an LLD structure, which is formed into a device forming region of a semiconductor substrate 1 separated by a separating oxide film 2 and includes a gate electrode 7 and a side wall insulating film 9, source and drain regions 11 and 13 of Nch and Pch formed on both sides of the LDD structure, and an insulating film 14 covering the separating oxide film 2 and the separating ends of the source and drain regions 11 and 13.
申请公布号 JP2001351991(A) 申请公布日期 2001.12.21
申请号 JP20000173472 申请日期 2000.06.09
申请人 MITSUBISHI ELECTRIC CORP 发明人 KASAOKA TATSUO
分类号 H01L21/8238;H01L21/8242;H01L27/092;H01L27/108 主分类号 H01L21/8238
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