| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a suscepter which does not generate particles, at a low cost. SOLUTION: Many protrusions 6 are formed at the sample-mounting side of a mounting plate 2, and a sample-holding layer 7 (holding region 6a) having top surfaces of the protrusions 6 contains a fluoride of elements selected from the group consisting of yttrium and a lanthanoid or two or more types of complex substances of the fluorides as main components. Intermediate layers 9 (intermediate regions 6b) of lower parts of the protrusions 6 contain an oxide of the element selected from the group, consisting of the yttrium and the lanthanoid or two or more types of composite substances of the oxides as main component. Furthermore, a suscepter body 8, made of the plate 2 and a support plate 3, is made of an alumina-base sintered material or an aluminum nitride- base sintered material.</p> |
